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Innovating Vacuum technology Worldwide
Main purpose
Semicables such as etching, ion injection, CVD and other medium and harsh processes in semiconductor industry
Technical characteristics
Rogez rotor and claw rotor combined design
High -speed small volume design, the structure of the pump body is compact
The pump can be equipped with large flow N 可, the temperature is controllable, and it is suitable for harsh craftsmanship containing corrosive and dusty processes
High reliability, low operating cost
SGH-1200A
SGH-1800A、SGH-1800AN、SGH-1800AT
SGH-3000B、SGH-3000BT
SGH-6000A、SGH-6000AT
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E-mail：sales@sky.ac.cn
Address：No.1 Xinyuan Street, Hunnan District, Shenyang City, China
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