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Innovating Vacuum technology Worldwide
Dry vacuum pump-SGL series:
Main purpose
Clean processes such as loading and transmission in the semiconductor industry
Technical characteristics
Multi -level Rocks Structure Design
High -speed small volume design, the structure of the pump body is compact, the energy consumption is low reliability, and the operating cost is low.
SGL-120A、SGL-120AN
SGL-600A
SGL-1000A
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