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Innovating Vacuum technology Worldwide
Main purpose
SGM products are mainly used in semiconductor medium craftsmanship, such as ETCH and so on.
Technical characteristics
The groove design on the top of the rotor to enhance the pumping capacity of the pump
Seventh -level Rock structural design, the structure is compact and reduced energy consumption
Large flow pump body N吹, blowing, controlled temperature, can apply different customer needs
SGM-600A
SGM-1200A
TEL：024-23826855
E-mail：sales@sky.ac.cn
Address：No.1 Xinyuan Street, Hunnan District, Shenyang City, China
Copyright (C) SKY Technology Development Co., Ltd. Chinese Academy of Sciences
辽ICP备19006370号-1 Power by 300.cn shenyang
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