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Linear-rotary movement transfer arm model
|
Item |
Technical Data |
|
Mounting flange |
CF50 / CF40 / CF63 |
|
Linear Coupled Torque |
170N |
|
Rotary Coupled Torque |
3.7N.M |
|
Linear repetitive accuracy |
±0.5mm |
|
Center deflection accuracy |
≤±1.5° |
|
Front-end Longitudinal axis travel length (XY linear movement transfer arm function) |
10mm/15mm |
|
Maximum load capability |
≤10N.M |
|
Working pressure |
Static vacuum: 10-8Pa, dynamic vacuum: 10-7Pa |
|
Max. bakeout temperature |
≤150℃ |
|
Travel Length（mm) |
300/400/500/600/700/800/900/1000/1100/1250 |
TEL：024-23826855
E-mail：sales@sky.ac.cn
Address：No.1 Xinyuan Street, Hunnan District, Shenyang City, China
Copyright (C) SKY Technology Development Co., Ltd. Chinese Academy of Sciences
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