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TSP Cartridge

Thetitaniumsublimationpump(TSP)cartridgeisaneffectivetooltopumpthegetterablegasesinUHV/XHVsystems.SKYcompanyadoptsthefilament-typeTSPsource,theTSPcanbeaddedtotheinsideoftheionpumporasaseparatepumpingunit.Iftheambientshiedorcryopanelisneeded,couldbeprovidedseparately. •ProvidedonCF35flange•Filamentcartridgecontainsthreetitanium-molybdenumfilaments ItemUnitParametersGetterablegases H2、N2、CO etc.PumpingsppedL/S4800(CF100),6800(CF150)/N2,@20℃BakingTemperature℃≤250Flange CF35TSPSource 85% titanium,15% molybdenumFilamentdiametermm2Filamentquantitypcs3Lifetime 12hoursat50AMaximumoperatingcurrentA50
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The titanium sublimation pump (TSP) cartridge is an effective tool to pump the getterable gases in UHV/XHV systems. SKY company adopts the filament-type TSP source, the TSP can be added to the inside of the ion pump or as a separate pumping unit. If the ambient shied or cryopanel is needed, could be provided separately. 
• Provided on CF35 flange
• Filament cartridge contains three titanium-molybdenum filaments

 

Item

Unit

Parameters

Getterable gases

 

H2、N2、CO etc.

Pumping spped

L/S

4800(CF100),6800(CF150)/ N2,@20℃

Baking Temperature

℃

≤250

Flange

 

CF35

TSP Source

 

85% titanium,15% molybdenum

Filament diameter

mm

2

Filament quantity

pcs

3

Lifetime

 

12 hours at 50A

Maximum operating current

A

50


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E-mail:sales@sky.ac.cn
Address:No.1 Xinyuan Street, Hunnan District, Shenyang City, China
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