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TSP Cartridge
|
Item |
Unit |
Parameters |
|
Getterable gases |
|
H2、N2、CO etc. |
|
Pumping spped |
L/S |
4800(CF100),6800(CF150)/ N2,@20℃ |
|
Baking Temperature |
℃ |
≤250 |
|
Flange |
|
CF35 |
|
TSP Source |
|
85% titanium,15% molybdenum |
|
Filament diameter |
mm |
2 |
|
Filament quantity |
pcs |
3 |
|
Lifetime |
|
12 hours at 50A |
|
Maximum operating current |
A |
50 |

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